Application

17240050 · REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE

Filed 2021-04-26 · Granted · Patent 11686951 (2023-06-27) The official file ↗The patent and its PDF ↗ · Art unit 2872 · Examiner William R Alexander Easy · CPC G02B 27/48 · ASML Netherlands B.V. · ASML CIP (San Diego) / DMIPG

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

21.9 mo

to disposition 26.0 mo

Statutes raised

0 actions read

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