Application

17257900 · SUBSTRATE POSITIONING DEVICE WITH REMOTE TEMPERATURE SENSOR

Filed 2021-01-05 · Granted · Patent 12051607 (2024-07-30) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Carlos Gabriel Perez-Guzman Typical · CPC H10P 72/0602 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

33.4 mo

to disposition 42.8 mo

Statutes raised

103

2 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.