Application

17283722 · APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATERIAL IN AN EUV LIGHT SOURCE

Filed 2021-04-08 · Granted · Patent 11874608 (2024-01-16) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Hanway Chang Typical · CPC H05G 2/0094 · ASML Netherlands B.V. · ASML CIP (San Diego) / DMIPG

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

24.6 mo

to disposition 33.3 mo

Statutes raised

102

1 actions read

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