Application

17347048 · System And Methods Using An Inline Surface Engineering Source

Filed 2021-06-14 · Granted · Patent 11862433 (2024-01-02) The official file ↗The patent and its PDF ↗ · Art unit 2891 · Examiner Dmitriy Yemelyanov Typical · CPC H01J 37/3171 · Varian Semiconductor Equipment Associates, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

16.2 mo

to disposition 30.6 mo

Statutes raised

103

2 actions read

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