Application

17363057 · METHOD TO PREDICT YIELD OF A DEVICE MANUFACTURING PROCESS

Filed 2021-06-30 · Granted · Patent 11714357 (2023-08-01) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Peter B Kim Typical · CPC G03F 7/706835 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

18.5 mo

to disposition 25.0 mo

Statutes raised

103

1 actions read

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