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17363645 · IMPLANTATION AND ANNEALING FOR SEMICONDUCTOR DEVICE

Filed 2021-06-30 · Granted · Patent 11640986 (2023-05-02) The official file ↗The patent and its PDF ↗ · Art unit 2897 · Examiner Hung K Vu Typical · CPC H10D 64/017 · Taiwan Semiconductor Manufacturing Co., Ltd. · Intellectual Property Division

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
14.1 mo
to disposition 22.0 mo
Statutes raised
102 103
1 actions read
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