Application
17363645 · IMPLANTATION AND ANNEALING FOR SEMICONDUCTOR DEVICE
Filed 2021-06-30 · Granted · Patent 11640986 (2023-05-02) The official file ↗The patent and its PDF ↗ · Art unit 2897 · Examiner Hung K Vu Typical · CPC H10D 64/017 · Taiwan Semiconductor Manufacturing Co., Ltd. · Intellectual Property Division
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
14.1 mo
to disposition 22.0 mo
Statutes raised
102 103
1 actions read