PATLY.AIApplication
17367284 · Bottom Fed Sublimation Bed for High Saturation Efficiency in Semiconductor Applications
Filed 2021-07-02 · Granted · Patent 11584990 (2023-02-21) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Rudy Zervigon Easy · CPC C23C 16/4481 · Applied Materials, Inc. · SERVILLA WHITNEY LLC/AMT
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