Application

17377201 · OVERLAY MARK, OVERLAY MARKING METHOD AND OVERLAY MEASURING METHOD

Filed 2021-07-15 · Granted · Patent 12259661 (2025-03-25) The official file ↗The patent and its PDF ↗ · Art unit 2899 · Examiner Caleen O Sullivan Easy · CPC G03F 1/42 · NEXCHIP SEMICONDUCTOR CORPORATION · Xiaofei XUE

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

38.2 mo

to disposition 44.3 mo

Statutes raised

102

1 actions read

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