Application

17383825 · SYNTHESIS AND USE OF PRECURSORS FOR ALD OF TELLURIUM AND SELENIUM THIN FILMS

Filed 2021-07-23 · Granted · Patent 11814400 (2023-11-14) The official file ↗The patent and its PDF ↗ · Art unit 1622 · Examiner Alexander R Pagano Easy · CPC H10P 14/24 · ASM INTERNATIONAL N.V. · BANNER & WITCOFF, LTD.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.4 mo

to disposition 27.7 mo

Statutes raised

1 actions read

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