Application

17389842 · PROCESS WINDOW BASED ON DEFECT PROBABILITY

Filed 2021-07-30 · Granted · Patent 11822255 (2023-11-21) The official file ↗The patent and its PDF ↗ · Art unit 1759 · Examiner Steven H Whitesell Typical · CPC G03F 7/705 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman LLP(ASML)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.6 mo

to disposition 27.7 mo

Statutes raised

1 actions read

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