Application

17466413 · HOLDING APPARATUS AND METHOD FOR HOLDING A SUBSTRATE

Filed 2021-09-03 · Granted · Patent 11504825 (2022-11-22) The official file ↗The patent and its PDF ↗ · Art unit 3723 · Examiner Jonathan G Santiago Martinez Easy · CPC H10P 72/78 · SUSS MicroTec Lithography GmbH · HAYES SOLOWAY P.C.

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

13.3 mo

to disposition 14.6 mo

Statutes raised

0 actions read

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