Application
17475083 · SUBSTRATE TRANSPORT
Filed 2021-09-14 · Granted · Patent 11658051 (2023-05-23) The official file ↗The patent and its PDF ↗ · Art unit 3652 · Examiner Glenn F Myers Typical · CPC H10P 72/3408 · Brooks Automation US, LLC · Perman & Green, LLP
Office actions
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first was Notice of allowance
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To first action
15.7 mo
to disposition 20.2 mo
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