Application

17488169 · SYSTEMS AND METHODS FOR UNPRECEDENTED CRYSTALLINE QUALITY IN PHYSICAL VAPOR DEPOSITION-BASED ULTRA-THIN ALUMINUM NITRIDE FILMS

Filed 2021-09-28 · Abandoned The official file ↗ · Art unit 1713 · Examiner Thomas T Pham Hard · CPC H01J 37/32715 · OEM Group, LLC · HARVEY S. KAUGET

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

21.2 mo

to disposition 44.0 mo

Statutes raised

4 actions read

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