Application

17490405 · Systems and Methods of Creating Multiple Electron Beams

Filed 2021-09-30 · Granted · Patent 11651934 (2023-05-16) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Jason L McCormack Typical · CPC H01J 37/09 · KLA Corporation · KLA Corporation / Hodgson Russ LLP 2

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.9 mo

to disposition 19.5 mo

Statutes raised

102 103

1 actions read

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