Application
17495730 · Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films
Filed 2021-10-06 · Granted · Patent 12217949 (2025-02-04) The official file ↗The patent and its PDF ↗ · Art unit 1794 · Examiner Michael A Band Hard · CPC H01J 37/3405 · IonQuest Corp. · IonQuest Corp.
Office actions
2
first was Restriction requirement
RCEs
1
no appeal
To first action
24.0 mo
to disposition 40.0 mo
Statutes raised
102 103 112 DP
2 actions read