Application

17496555 · METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

Filed 2021-10-07 · Granted · Patent 12737430 (2026-09-15) The official file ↗The patent and its PDF ↗ · Art unit 2189 · Examiner Bijan Mapar Typical · CPC G03F 7/70508 · ASML Netherlands B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

22.1 mo

to disposition 59.3 mo

Statutes raised

101 102 103

6 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.