Application

17517626 · SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEPOSITION IN THE SAME CHAMBER

Filed 2021-11-02 · Abandoned The official file ↗ · Art unit 1794 · Examiner Michael A Band Hard · CPC C23C 14/022 · OEM Group, LLC · HARVEY S. KAUGET

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

13.6 mo

to disposition 33.4 mo

Statutes raised

103 112

4 actions read

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