Application

17543150 · System and Method for Controlling Electrostatic Clamping of Multiple Platens on a Spinning Disk

Filed 2021-12-06 · Granted · Patent 11670532 (2023-06-06) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Hsien C Tsai Typical · CPC H10P 72/722 · Applied Materials, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

14.4 mo

to disposition 18.0 mo

Statutes raised

0 actions read

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