Application

17547623 · Spinning Disk with Electrostatic Clamped Platens for Ion Implantation

Filed 2021-12-10 · Granted · Patent 12002649 (2024-06-04) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner David E Smith Typical · CPC H10P 72/722 · Applied Materials, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

25.5 mo

to disposition 29.8 mo

Statutes raised

1 actions read

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