Application

17554029 · STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS

Filed 2021-12-17 · Granted · Patent 12222655 (2025-02-11) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Mesfin T Asfaw Typical · CPC G03F 7/7025 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

29.0 mo

to disposition 37.8 mo

Statutes raised

103

1 actions read

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