Application

17561268 · SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE

Filed 2021-12-23 · Abandoned The official file ↗ · Art unit 1714 · Examiner Mikhail Kornakov Hard · CPC H10P 72/0414 · EBARA CORPORATION · BakerHostetler

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

14.0 mo

to disposition 26.4 mo

Statutes raised

102 103 112

2 actions read

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