Application

17563186 · Charged Particle Beam Device

Filed 2021-12-28 · Granted · Patent 11798780 (2023-10-24) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Hanway Chang Typical · CPC H01J 37/28 · Hitachi High-Tech Corporation · CROWELL & MORING LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

13.2 mo

to disposition 21.8 mo

Statutes raised

102

1 actions read

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