Application

17565144 · SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2021-12-29 · Granted · Patent 12197140 (2025-01-14) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

appealed

To first action

8.7 mo

to disposition 36.5 mo

Statutes raised

102 103 DP

4 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.