Application

17575244 · METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS

Filed 2022-01-13 · Granted · Patent 11967497 (2024-04-23) The official file ↗The patent and its PDF ↗ · Art unit 1711 · Examiner Alexander Markoff Hard · CPC H10P 70/20 · ACM Research (Shanghai) Inc. · K&L GATES LLP-Pittsburgh

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

25.1 mo

to disposition 27.3 mo

Statutes raised

0 actions read

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