Application

17600631 · IMAGE SENSOR FOR IMMERSION LITHOGRAPHY

Filed 2021-10-01 · Granted · Patent 11774868 (2023-10-03) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

17.0 mo

to disposition 24.0 mo

Statutes raised

103

2 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.