PATLY.AIApplication
17603812 · OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
Filed 2021-10-14 · Granted · Patent 11880144 (2024-01-23) The official file ↗The patent and its PDF ↗ · Art unit 1759 · Examiner Steven H Whitesell Typical · CPC G03F 7/70708 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP
Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
16.6 mo
to disposition 27.3 mo
Statutes raised
102 103
2 actions read