Application

17636308 · WAVELENGTH SELECTION MODULE, ILLUMINATION SYSTEM AND METROLOGY SYSTEM

Filed 2022-02-17 · Granted · Patent 12460971 (2025-11-04) The official file ↗The patent and its PDF ↗ · Art unit 2872 · Examiner John Curtis Sipes Typical · CPC G01J 3/0237 · ASML Netherlands B.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

30.0 mo

to disposition 44.6 mo

Statutes raised

102 103 112

2 actions read

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