Application

17644414 · WAFER REGISTRATION AND OVERLAY MEASUREMENT SYSTEMS AND RELATED METHODS

Filed 2021-12-15 · Granted · Patent 12230546 (2025-02-18) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC H10P 74/203 · Micron Technology, Inc. · TRASK BRITT, P.C./ MICRON TECHNOLOGY

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

26.7 mo

to disposition 38.1 mo

Statutes raised

102 103 DP

1 actions read

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