Application

17651183 · METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION

Filed 2022-02-15 · Granted · Patent 11972965 (2024-04-30) The official file ↗The patent and its PDF ↗ · Art unit 3655 · Examiner Kyle O Logan Typical · CPC H10P 72/3302 · Brooks Automation, Inc. · Perman & Green, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

15.9 mo

to disposition 26.4 mo

Statutes raised

102 DP

1 actions read

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