Application

17661095 · SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Filed 2022-04-28 · Granted · Patent 12745590 (2026-09-22) The official file ↗The patent and its PDF ↗ · Art unit 1711 · Examiner Michael E Barr Hard · CPC H10P 72/0416 · Tokyo Electron Limited · Patent Docket Department

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

24.8 mo

to disposition 52.8 mo

Statutes raised

102 103 112

3 actions read

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