Application

17679306 · Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activated Atomic Layer Deposition (PEALD/PAALD)

Filed 2022-02-24 · Granted · Patent 12195850 (2025-01-14) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Anna M Crowell Typical · CPC C23C 16/45536 · Nano-Master, Inc. · Marek Alboszta

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.8 mo

to disposition 34.7 mo

Statutes raised

103

3 actions read

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