Application

17683076 · MEASUREMENT AND CORRECTION OF OPTICAL ABERRATIONS IN CHARGED PARTICLE BEAM MICROSCOPY

Filed 2022-02-28 · Granted · Patent 11990315 (2024-05-21) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Jason L McCormack Typical · CPC H01J 37/153 · FEI Company · KLARQUIST SPARKMAN, LLP (DCG-Thermo Fisher)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.9 mo

to disposition 26.7 mo

Statutes raised

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