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Application

17688258 · METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS AND RELATED SEMICONDUCTOR DEVICE STRUCTURES INCLUDING A MOLYBDENUM NITRIDE FILM

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Filed 2022-03-07 · Granted · Patent 11827978 (2023-11-28) The official file ↗The patent and its PDF ↗ · Art unit 2811 · Examiner Tong-Ho Kim Easy · CPC H10W 20/033 · ASM IP Holding B.V. · Snell & Wilmer (ASM IP Holding B.V.)

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
13.5 mo
to disposition 20.7 mo
Statutes raised
DP
1 actions read
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