Application

17689934 · DEVICE-LIKE METROLOGY TARGETS

Filed 2022-03-08 · Granted · Patent 11709433 (2023-07-25) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Hwa S Lee Hard · CPC G03F 7/70625 · KLA-Tencor Corporation · KLA Corporation / Hodgson Russ LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

9.1 mo

to disposition 16.6 mo

Statutes raised

0 actions read

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