Application

17690107 · Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films

Filed 2022-03-09 · Granted · Patent 11821068 (2023-11-21) The official file ↗The patent and its PDF ↗ · Art unit 1794 · Examiner Rodney Glenn McDonald Typical · CPC C23C 14/354 · IonQuest Corp. · IonQuest Corp.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.0 mo

to disposition 20.4 mo

Statutes raised

112 DP

1 actions read

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