Application

17707776 · MULTI-LAYER CALIBRATION FOR EMPIRICAL OVERLAY MEASUREMENT

Filed 2022-03-29 · Granted · Patent 12386271 (2025-08-12) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Clark David Hovis · CPC G01B 11/27 · Onto Innovation Inc. · Paradice and Li, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

31.7 mo

to disposition 40.5 mo

Statutes raised

103

1 actions read

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