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17731414 · LOW MASS SUBSTRATE SUPPORT

Filed 2022-04-28 · Granted · Patent 12584240 (2026-03-24) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner Aiden Y Lee Typical · CPC H10P 72/7624 · Applied Materials, Inc. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions
2
first was Restriction requirement
RCEs
1
no appeal
To first action
32.5 mo
to disposition 46.9 mo
Statutes raised
103 112
2 actions read
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