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17748780 · GUARDBANDS IN SUBSTRATE PROCESSING SYSTEMS

Filed 2022-05-19 · Granted · Patent 12019507 (2024-06-25) The official file ↗The patent and its PDF ↗ · Art unit 2114 · Examiner Sarai E Butler Typical · CPC G05B 23/024 · Applied Materials, Inc. · LOWENSTEIN SANDLER LLP / AMAT

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
13.4 mo
to disposition 25.2 mo
Statutes raised
103
1 actions read
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