Application

17748783 · GUARDBANDS IN SUBSTRATE PROCESSING SYSTEMS

Filed 2022-05-19 · Granted · Patent 12566660 (2026-03-03) The official file ↗The patent and its PDF ↗ · Art unit 2118 · Examiner Mario M Velez-Lopez Typical · CPC G05B 23/0275 · Applied Materials, Inc. · LOWENSTEIN SANDLER LLP / AMAT

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

25.8 mo

to disposition 45.5 mo

Statutes raised

101 103

3 actions read

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