PATLY.AIApplication
17753110 · POSITIVE TONE DEVELOPMENT OF CVD EUV RESIST FILMS
Filed 2022-02-18 · Pending The official file ↗ · Art unit 1737 · Examiner Daborah Chacko Davis Typical · CPC G03F 7/168 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
Office actions
4
first was Restriction requirement
RCEs
1
no appeal
To first action
36.8 mo
to disposition n/a
Statutes raised
·
3 actions read