Application

17766049 · MEASUREMENT SYSTEM AND METHOD FOR CHARACTERIZING A PATTERNING DEVICE

Filed 2022-04-01 · Granted · Patent 12443115 (2025-10-14) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/7085 · ASML Netherlands B.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

31.0 mo

to disposition 42.4 mo

Statutes raised

102 103 112

2 actions read

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