Application

17779520 · MULTI-STATE PULSING FOR ACHIEVING A BALANCE BETWEEN BOW CONTROL AND MASK SELECTIVITY

Filed 2022-05-24 · Granted · Patent 12217972 (2025-02-04) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Jiong-Ping Lu Typical · CPC H10P 50/73 · Lam Research Corporation · Polygon IP, LLP / Lam Research

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

24.9 mo

to disposition 32.4 mo

Statutes raised

112

1 actions read

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