Application

17799897 · COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS

Filed 2022-08-15 · Granted · Patent 12381105 (2025-08-05) The official file ↗The patent and its PDF ↗ · Art unit 3763 · Examiner Eric S Ruppert Typical · CPC H10P 72/722 · LAM RESEARCH CORPORATION · Harness, Dickey & Pierce, P.L.C. (Lam)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

20.7 mo

to disposition 35.7 mo

Statutes raised

102 103

1 actions read

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