Application

17811047 · PARTICLE BEAM INSPECTION APPARATUS

Filed 2022-07-06 · Granted · Patent 11942340 (2024-03-26) The official file ↗The patent and its PDF ↗ · Art unit 2884 · Examiner Gisselle M Gutierrez Typical · CPC H10P 72/0441 · ASML Netherlands B.V. · Finnegan/ASML

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.6 mo

to disposition 20.7 mo

Statutes raised

102 103

1 actions read

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