Application

17840960 · REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM DEPOSITION PROCESS

Filed 2022-06-15 · Granted · Patent 12043899 (2024-07-23) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner David P Turocy Typical · CPC H10P 14/22 · ASM IP Holding B.V. · Snell & Wilmer (ASM IP Holding B.V.)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

4.9 mo

to disposition 25.3 mo

Statutes raised

103 112

5 actions read

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