Application

17843054 · MEASUREMENT METHOD AND MEASUREMENT APPARATUS

Filed 2022-06-17 · Granted · Patent 11735402 (2023-08-22) The official file ↗The patent and its PDF ↗ · Art unit 2878 · Examiner Tony Ko Easy · CPC H01J 37/32917 · Tokyo Electron Limited · Weihrouch IP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

9.6 mo

to disposition 14.2 mo

Statutes raised

0 actions read

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