Application

17898179 · METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK

Filed 2022-08-29 · Abandoned The official file ↗ · Art unit 1746 · Examiner Abhishek A Patwardhan Typical · CPC H10P 72/722 · ENTEGRIS, INC. · ENTEGRIS, INC./OC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.6 mo

to disposition 23.3 mo

Statutes raised

103

3 actions read

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