Application

17922079 · GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS

Filed 2022-10-28 · Granted · Patent 12539569 (2026-02-03) The official file ↗The patent and its PDF ↗ · Art unit 3722 · Examiner Nicole N Ramos Typical · CPC B23Q 3/157 · Lam Research Corporation · Harness, Dickey & Pierce, P.L.C. (Lam)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

32.8 mo

to disposition 39.2 mo

Statutes raised

0 actions read

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