Application

17930332 · AUTO-FOCUS SENSOR IMPLEMENTATION FOR MULTI-COLUMN MICROSCOPES

Filed 2022-09-07 · Granted · Patent 12322568 (2025-06-03) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Jason L McCormack Typical · CPC H01J 37/21 · KLA Corporation · Kwan & Olynick LLP -- KLA

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

29.3 mo

to disposition 32.9 mo

Statutes raised

0 actions read

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