Application

17952067 · SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER

Filed 2022-09-23 · Granted · Patent 12055862 (2024-08-06) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Mesfin T Asfaw Typical · CPC G03F 7/707 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.1 mo

to disposition 22.4 mo

Statutes raised

103

1 actions read

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